JPS4910179A - - Google Patents
Info
- Publication number
- JPS4910179A JPS4910179A JP5293072A JP5293072A JPS4910179A JP S4910179 A JPS4910179 A JP S4910179A JP 5293072 A JP5293072 A JP 5293072A JP 5293072 A JP5293072 A JP 5293072A JP S4910179 A JPS4910179 A JP S4910179A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5293072A JPS5438593B2 (en]) | 1972-05-30 | 1972-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5293072A JPS5438593B2 (en]) | 1972-05-30 | 1972-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4910179A true JPS4910179A (en]) | 1974-01-29 |
| JPS5438593B2 JPS5438593B2 (en]) | 1979-11-21 |
Family
ID=12928544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5293072A Expired JPS5438593B2 (en]) | 1972-05-30 | 1972-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5438593B2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03435U (en]) * | 1989-05-26 | 1991-01-07 |
-
1972
- 1972-05-30 JP JP5293072A patent/JPS5438593B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03435U (en]) * | 1989-05-26 | 1991-01-07 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5438593B2 (en]) | 1979-11-21 |